Authors: SPIERINGS GACM BREED JM ULENAERS MJE VANVELDHOVEN PJ LARSEN PK

Citation: Gacm. Spierings et al., STRESSES IN RU PBZR0.4TI0.6O3/RU THIN-FILM STACKS FOR INTEGRATED FERROELECTRIC CAPACITORS/, Microelectronic engineering, 29(1-4), 1995, pp. 235-238