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Results: 2
SIMS STUDY OF RAPID THERMAL NITRIDATION OF SILICON DIOXIDE THICK-FILMS IN AMMONIA AMBIENT
Authors: BREELLE E RIGO S KILNER JA GANEM JJ
Citation: E. Breelle et al., SIMS STUDY OF RAPID THERMAL NITRIDATION OF SILICON DIOXIDE THICK-FILMS IN AMMONIA AMBIENT, Applied surface science, 81(2), 1994, pp. 127-135
SIMS STUDY OF RAPID NITRIDATION OF SILICON DIOXIDE THICK-FILMS IN AN AMMONIA AMBIENT
Authors: BREELLE E RIGO S KILNER JA GANEM JJ
Citation: E. Breelle et al., SIMS STUDY OF RAPID NITRIDATION OF SILICON DIOXIDE THICK-FILMS IN AN AMMONIA AMBIENT, Microelectronics, 25(7), 1994, pp. 501-505
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