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Authors: BREITBARTH FW BERG D DUMKE K TILLER HJ
Citation: Fw. Breitbarth et al., INVESTIGATION OF THE LOW-PRESSURE PLASMA-CHEMICAL CONVERSION OF FLUOROCARBON WASTE GASES, Plasma chemistry and plasma processing, 17(1), 1997, pp. 39-57

Authors: BREITBARTH FW BALD J RODEMEYER S SUHR H
Citation: Fw. Breitbarth et al., ON MASS-SPECTROSCOPIC AND EMISSION-SPECTROSCOPIC CVD PROCESS MONITORING OF ORGANOMETALLICS O-2 DISCHARGES/, Plasma chemistry and plasma processing, 13(2), 1993, pp. 289-309
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