Authors: DESGARDIN P NTSOENZOK E BARBOT JF BRIAUD J VERNOIS J ISABELLE DB

Citation: P. Desgardin et al., BEAM SCANNING SYSTEM FOR THE UNIFORMITY OF IMPLANTED DOSES IN A LARGE-AREA, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 267-269