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Results: 1
IN-SITU EXAMINATION OF THE CHEMICAL ETCHING OF SIO2-SI STRUCTURES USING AN ATOMIC-FORCE MICROSCOPE
Authors:
BUKHARAEV AA BUKHARAEVA AA NURGAZIZOV NI OVCHINNIKOV DV
Citation:
Aa. Bukharaev et al., IN-SITU EXAMINATION OF THE CHEMICAL ETCHING OF SIO2-SI STRUCTURES USING AN ATOMIC-FORCE MICROSCOPE, Technical physics letters, 24(11), 1998, pp. 863-865
Risultati:
1-1
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