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Results: 1
Spectroscopic in situ diagnostics of boron nitride film growth in plasma-enhanced deposition
Authors:
Lunk, A Bachem, P Scheible, P Ulrich, L
Citation:
A. Lunk et al., Spectroscopic in situ diagnostics of boron nitride film growth in plasma-enhanced deposition, APPL PHYS A, 72(5), 2001, pp. 557-564
Risultati:
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