Authors: Yaralioglu, GG Badi, MH Ergun, AS Cheng, CH Khuri-Yakub, BT Degertekin, FL

Citation: Gg. Yaralioglu et al., Lamb wave devices using capacitive micromachined ultrasonic transducers, APPL PHYS L, 78(1), 2001, pp. 111-113