Authors: Acharya, N Kirtikar, V Shooshtarian, S Doan, H Timans, PJ Balakrishnan, KS Knutson, KL

Citation: N. Acharya et al., Uniformity optimization techniques for rapid thermal processing systems, IEEE SEMIC, 14(3), 2001, pp. 218-226

Authors: Balakrishnan, KS Edgar, TF

Citation: Ks. Balakrishnan et Tf. Edgar, Model-based control in rapid thermal processing, THIN SOL FI, 365(2), 2000, pp. 322-333

Authors: Edgar, TF Butler, SW Campbell, WJ Pfeiffer, C Bode, C Hwang, SB Balakrishnan, KS Hahn, J

Citation: Tf. Edgar et al., Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities, AUTOMATICA, 36(11), 2000, pp. 1567-1603

Authors: Rastogi, AC Balakrishnan, KS Sharma, RK Jain, K

Citation: Ac. Rastogi et al., Growth phases during electrochemical selenization of vacuum deposited CuInmetal layers for the formation of semiconducting CuInSe2 films, THIN SOL FI, 357(2), 1999, pp. 179-188

Authors: Rastogi, AC Balakrishnan, KS Jain, K

Citation: Ac. Rastogi et al., Growth and properties of CdSe thin films by a new process of electrochemical selenization of Cd metal layers, MATER RES B, 34(8), 1999, pp. 1319-1332