Authors: Bapin, E von Rohr, PR

Citation: E. Bapin et Pr. Von Rohr, Deposition of SiO2 films from different organosilicon/O-2 plasmas under continuous wave and pulsed modes, SURF COAT, 142, 2001, pp. 649-654

Authors: Bayer, C Bapin, E von Rohr, PR

Citation: C. Bayer et al., Overall kinetics of SiOx remote-PECVD using different organosilicon monomers, SURF COAT, 119, 1999, pp. 874-878