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Results: 1-3 |
Results: 3
Low-pressure chemical vapor deposition of semi-insulating polycrystalline silicon thin films I. Experimental study and proposal of new kinetic laws
Authors: Barathieu, P Caussat, B Scheid, E Jaume, D Couderc, JP
Citation: P. Barathieu et al., Low-pressure chemical vapor deposition of semi-insulating polycrystalline silicon thin films I. Experimental study and proposal of new kinetic laws, J ELCHEM SO, 148(3), 2001, pp. C149-C155
Low-pressure chemical vapor deposition of semi-insulating polycrystalline silicon thin films II. Theoretical local analysis of the process
Authors: Barathieu, P Caussat, B Scheid, E Couderc, JP
Citation: P. Barathieu et al., Low-pressure chemical vapor deposition of semi-insulating polycrystalline silicon thin films II. Theoretical local analysis of the process, J ELCHEM SO, 148(3), 2001, pp. C156-C161
Chemical vapor deposition of semi-insulating polycrystalline silicon (SIPOS): Experience and simulation
Authors: Barathieu, P Caussat, B Scheid, E Jaume, D Couderc, JP
Citation: P. Barathieu et al., Chemical vapor deposition of semi-insulating polycrystalline silicon (SIPOS): Experience and simulation, J PHYS IV, 9(P8), 1999, pp. 173-180
Risultati: 1-3 |