Authors:
Barbadillo, L
Hernandez, MJ
Cervera, M
Piqueras, J
Citation: L. Barbadillo et al., Amorphous SixCyN layers prepared from electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD)., B S ESP CER, 39(4), 2000, pp. 453-457
Authors:
Barbadillo, L
Hernandez, MJ
Cervera, M
Piqueras, J
Citation: L. Barbadillo et al., Amorphous CNx layers from neon electron cyclotron resonance plasmas with N-2 and CH4 as precursors, J ELCHEM SO, 147(10), 2000, pp. 3864-3867
Authors:
Barbadillo, L
Gomez, FJ
Hernandez, MJ
Piqueras, J
Citation: L. Barbadillo et al., Nitrogen incorporation in amorphous SiCN layers prepared from electron cyclotron resonance plasmas, APPL PHYS A, 68(5), 1999, pp. 603-607