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Results:
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Results: 1
The growth kinetics study of CVD Cu on TiN barriers
Authors:
Pan, W Evans, DR Barrowciff, R Hsu, ST
Citation:
W. Pan et al., The growth kinetics study of CVD Cu on TiN barriers, J PHYS IV, 11(PR3), 2001, pp. 23-30
Risultati:
1-1
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