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Results: 2
Gettering issues using MeV ion implantation
Authors:
Rozgonyi, GA Glasko, JM Beaman, KL Koveshnikov, SV
Citation:
Ga. Rozgonyi et al., Gettering issues using MeV ion implantation, MAT SCI E B, 72(2-3), 2000, pp. 87-92
Lateral gettering of Fe on bulk and silicon-on-insulator wafers
Authors:
Beaman, KL Kononchuk, O Koveshnikov, S Osburn, CM Rozgonyi, GA
Citation:
Kl. Beaman et al., Lateral gettering of Fe on bulk and silicon-on-insulator wafers, J ELCHEM SO, 146(5), 1999, pp. 1925-1928
Risultati:
1-2
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