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Citation: Ga. Rozgonyi et al., Gettering issues using MeV ion implantation, MAT SCI E B, 72(2-3), 2000, pp. 87-92

Authors: Beaman, KL Kononchuk, O Koveshnikov, S Osburn, CM Rozgonyi, GA

Citation: Kl. Beaman et al., Lateral gettering of Fe on bulk and silicon-on-insulator wafers, J ELCHEM SO, 146(5), 1999, pp. 1925-1928