Authors:
Mainka, G
Beitel, G
Schnabel, RF
Saenger, A
Dehm, C
Citation: G. Mainka et al., Chemical mechanical polishing of iridium and iridium oxide for damascene processes, J ELCHEM SO, 148(10), 2001, pp. G552-G558
Authors:
Beitel, G
Wendt, H
Fritsch, E
Weinrich, V
Engelhardt, M
Hasler, B
Rohr, T
Bergmann, R
Scheler, U
Malek, KH
Nagel, N
Gschwandtner, A
Pamler, W
Honlein, W
Dehm, C
Mazure, C
Citation: G. Beitel et al., A novel low-temperature (Ba,Sr)TiO3 (BST) process with Ti/TiN barrier for Gbit DRAM applications, MICROEL ENG, 48(1-4), 1999, pp. 299-302