Authors:
Kaganovich, I
Misina, M
Berezhnoi, SV
Gijbels, R
Citation: I. Kaganovich et al., Electron Boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonancedischarge, PHYS REV E, 61(2), 2000, pp. 1875-1889
Authors:
Berezhnoi, SV
Kaganovich, ID
Misina, M
Bogaerts, A
Gijbels, R
Citation: Sv. Berezhnoi et al., Semianalytical description of nonlocal secondary electrons in a radio frequency capacitively coupled plasma at intermediate pressures, IEEE PLAS S, 27(5), 1999, pp. 1339-1347