Authors: Bersin, R Horn, A Xu, H Dopp, D Boumerzoug, M

Citation: R. Bersin et al., Process and environmental benefits with solvent-free stripping, SOL ST TECH, 44(4), 2001, pp. 52

Authors: Au, WK Solis, R Bersin, R Xu, H Boumerzoug, M

Citation: Wk. Au et al., Complete solvent free stripping of via structures using NF3/H2O/O-2 ashingchemistry, J VAC SCI A, 17(4), 1999, pp. 1364-1368