Authors:
Gesheva, KA
Ivanova, T
Gogova, D
Beshkov, G
Citation: Ka. Gesheva et al., Formation of MoSi2 by rapid thermal annealing in vacuum of CVD-Mo films onsilicon substrate, VACUUM, 58(2-3), 2000, pp. 502-508
Citation: D. Spassov et al., Effects of rapid thermal annealing in vacuum on electrical properties of thin Ta2O5-Si structures, MICROELEC J, 31(8), 2000, pp. 653-661
Authors:
Zambov, L
Ivanov, B
Georgiev, G
Popov, C
Vassilev, V
Beshkov, G
Citation: L. Zambov et al., Low pressure chemical vapour deposition of CNx layers by interaction between tetramethylguanidine and cyanurchloride, J PHYS IV, 9(P8), 1999, pp. 501-508
Authors:
Petrov, P
Dimitrov, D
Beshkov, G
Krastev, V
Nemska, S
Georgiev, C
Citation: P. Petrov et al., Carbon nitride films synthesized by electron beam evaporation of carbon and nitrogen ion bombardment, VACUUM, 52(4), 1999, pp. 501-504