Citation: Iw. Rangelow et S. Biehl, Fabrication and electrical characterization of high aspect ratio silicon field emitter arrays, J VAC SCI B, 19(3), 2001, pp. 916-919
Authors:
Barth, W
Debski, T
Shi, F
Hudek, P
Kostic, I
Rangelow, IW
Biehl, S
Iwert, T
Grabiec, P
Studzinska, K
Mitura, S
Bekh, II
Lushkin, AE
Il'chenko, LG
Il'chenko, VV
Haindl, G
Citation: W. Barth et al., Field emission cathode array with self-aligned gate electrode fabricated by silicon micromachining, J VAC SCI B, 18(6), 2000, pp. 3544-3548