Authors:
Weyrauch, T
Vorontsov, MA
Bifano, TG
Hammer, JA
Cohen, M
Cauwenberghs, G
Citation: T. Weyrauch et al., Microscale adaptive optics: wave-front control with a mu-mirror array and a VLSI stochastic gradient descent controller, APPL OPTICS, 40(24), 2001, pp. 4243-4253
Citation: Mn. Horenstein et al., Differential capacitive position sensor for planar MEMS structures with vertical motion, SENS ACTU-A, 80(1), 2000, pp. 53-61