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Results: 1-5 |
Results: 5

Authors: Whitacre, JF Yalisove, SM Bilello, JC
Citation: Jf. Whitacre et al., Real-time/in situ diffraction study of phase and microstructural evolutionin sputtered beta-Ta/Ta2O5 films, J VAC SCI A, 19(6), 2001, pp. 2910-2919

Authors: Kendig, LP Rek, ZU Yalisove, SM Bilello, JC
Citation: Lp. Kendig et al., The role of impurities and microstructure on residual stress in nanoscale Mo films, SURF COAT, 132(2-3), 2000, pp. 124-129

Authors: Zhao, ZB Rek, ZU Bilello, JC
Citation: Zb. Zhao et al., Observation of the adhesion of thin Ta polycrystalline films to Si wafers via in situ topography/radiography, PHI T ROY A, 357(1761), 1999, pp. 2681-2688

Authors: Cammarata, RC Bilello, JC Greer, AL Sieradzki, K Yalisove, SM
Citation: Rc. Cammarata et al., Stresses in multilayered thin films, MRS BULL, 24(2), 1999, pp. 34-38

Authors: Malhotra, AK Whitacre, JF Zhao, ZB Hershberger, J Yalisove, SM Bilello, JC
Citation: Ak. Malhotra et al., An in situ ex situ X-ray analysis system for thin sputtered films, SURF COAT, 110(1-2), 1998, pp. 105-110
Risultati: 1-5 |