Authors: Summerfelt, SR Moise, TS Xing, G Colombo, L Sakoda, T Gilbert, SR Loke, ALS Ma, S Wills, LA Kavari, R Hsu, T Amano, J Johnson, ST Vestcyk, DJ Russell, MW Bilodeau, SM van Buskirk, P

Citation: Sr. Summerfelt et al., Demonstration of scaled (>= 0.12 mu m(2)) Pb(Zr,Ti)O-3 capacitors on W plugs with Al interconnect, APPL PHYS L, 79(24), 2001, pp. 4004-4006

Authors: Roeder, JF Baum, TH Bilodeau, SM Stauf, GT Ragaglia, C Russell, MW Van Buskirk, PC

Citation: Jf. Roeder et al., Liquid-delivery MOCVD: Chemical and process perspectives on ferro-electricthin film growth, ADV MAT OPT, 10(3-5), 2000, pp. 145-154

Authors: Celii, FG Moise, TS Summerfelt, SR Archer, L Chen, P Gilbert, S Beavers, R Bilodeau, SM Vestyck, DJ Johnston, ST Russell, MW Van Buskirk, PC

Citation: Fg. Celii et al., Plasma etching and electrical characterization of Ir/IrO2/PZT/Ir FeRAM device structures, INTEGR FERR, 27(1-4), 1999, pp. 1271-1285

Authors: Bilodeau, SM Johnston, ST Russell, MW Vestyck, DJ Van Buskirk, PC

Citation: Sm. Bilodeau et al., Voltage scaling of ferroelectric thin films deposited by CVD, INTEGR FERR, 26(1-4), 1999, pp. 821-837