Authors:
Blom, MT
Chmela, E
Gardeniers, JGE
Berenschot, JW
Elwenspoek, M
Tijssen, R
van den Berg, A
Citation: Mt. Blom et al., Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections, J MICROM M, 11(4), 2001, pp. 382-385