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Results: 1
Multilayer planarization of polymer dielectrics
Authors:
Chiniwalla, P Manepalli, R Farnsworth, K Boatman, M Dusch, B Kohl, P Bidstrup-Allen, SA
Citation:
P. Chiniwalla et al., Multilayer planarization of polymer dielectrics, IEEE T AD P, 24(1), 2001, pp. 41-53
Risultati:
1-1
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