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Results: 1
Monte Carlo simulation of silicon amorphization during ion implantation
Authors:
Bohmayr, W Burenkov, A Lorenz, J Ryssel, H Selberherr, S
Citation:
W. Bohmayr et al., Monte Carlo simulation of silicon amorphization during ion implantation, IEEE COMP A, 17(12), 1998, pp. 1236-1243
Risultati:
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