Citation: P. Bondavalli et al., Influence of the involuntary underetching on the mechanical properties of tunable Fabry-Perot filters for optical communications, J MICROEL S, 10(2), 2001, pp. 298-301
Authors:
Bondavalli, P
Benyattou, T
Garrigues, M
Leclercq, JL
Jourba, S
Pautet, C
Hugon, X
Citation: P. Bondavalli et al., Opto-mechanical design of tuneable InP-based Fabry-Perot filter for gas analysis, SENS ACTU-A, 94(3), 2001, pp. 136-141