Authors:
Ayon, AA
Ishihara, K
Braff, RA
Sawin, HH
Schmidt, MA
Citation: Aa. Ayon et al., Microfabrication and testing of suspended structures compatible with silicon-on-insulator technology, J VAC SCI B, 17(4), 1999, pp. 1589-1593
Authors:
Ayon, AA
Ishihara, K
Braff, RA
Sawin, HH
Schmidt, MA
Citation: Aa. Ayon et al., Application of the footing effect in the micromachining of self-aligned, free-standing, complimentary metal-oxide-semiconductor compatible structures, J VAC SCI A, 17(4), 1999, pp. 2274-2279
Authors:
Ayon, AA
Braff, RA
Bayt, R
Sawin, HH
Schmidt, MA
Citation: Aa. Ayon et al., Influence of coil power on the etching characteristics in a high density plasma etcher, J ELCHEM SO, 146(7), 1999, pp. 2730-2736