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The mechanism of cubic boron nitride deposition in hydrogen plasmas
Authors:
Konyashin, I Aldinger, F Babaev, V Khvostov, V Guseva, M Bregadze, A Baumgartner, KM Rauchle, E
Citation:
I. Konyashin et al., The mechanism of cubic boron nitride deposition in hydrogen plasmas, THIN SOL FI, 356, 1999, pp. 96-104
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