Authors:
Hsieh, JT
Hwang, JM
Hwang, HL
Breitschadel, O
Schweizer, H
Citation: Jt. Hsieh et al., Defect depth profiling using photoluminescence and cathodoluminescence spectroscopy: the role of oxygen on reactive ion beam etching of GaN in O-2/Arplasmas, APPL SURF S, 175, 2001, pp. 450-455
Authors:
Breitschadel, O
Hsieh, JT
Kuhn, B
Scholz, F
Schweizer, H
Citation: O. Breitschadel et al., Effect of Ar ion beam channeling on AlGaN/GaN heterostructures during the ion beam etching process, APPL PHYS L, 76(14), 2000, pp. 1899-1901
Authors:
Breitschadel, O
Kuhn, B
Scholz, F
Schweizer, H
Citation: O. Breitschadel et al., Minimization of leakage current of recessed gate AlGaN/GaN HEMTs by optimizing the dry-etching process, J ELEC MAT, 28(12), 1999, pp. 1420-1423