Authors: Liew, LA Zhang, WG An, LN Shah, S Luo, RL Liu, YP Cross, T Dunn, ML Bright, V Daily, JW Raj, R Anseth, K

Citation: La. Liew et al., Ceramic MEMS - New materials, innovative processing and future applications, AM CERAM S, 80(5), 2001, pp. 25-30