Authors:
Roman, P
Lee, DO
Brubaker, M
Kamieniecki, E
Ruzyllo, J
Citation: P. Roman et al., Characterization of conductive oxides on silicon using non-contact surfacecharge profiling, MICROEL ENG, 48(1-4), 1999, pp. 181-184
Authors:
Brubaker, M
Roman, P
Staffa, J
Ruzyllo, J
Citation: M. Brubaker et al., Monitoring of chemical oxide removal from silicon surfaces using a surfacephotovoltage technique, EL SOLID ST, 1(3), 1998, pp. 130-132