Citation: H. Busta et al., Performance improvement of gated silicon field emitters with a thin layer of boron nitride, J VAC SCI B, 19(3), 2001, pp. 907-911
Authors:
Busta, H
Amantea, R
Furst, D
Chen, JM
Turowski, M
Mueller, C
Citation: H. Busta et al., A MEMS shield structure for controlling pull-in forces and obtaining increased pull-in voltages, J MICROM M, 11(6), 2001, pp. 720-725