Authors: Butefisch, S Schoft, A Buttgenbach, S

Citation: S. Butefisch et al., Three-axes monolithic silicon low-g accelerometer, J MICROEL S, 9(4), 2000, pp. 551-556

Authors: Butefisch, S Buttgenbach, S

Citation: S. Butefisch et S. Buttgenbach, Silicon three-axial tactile force sensor, TEC MES, 66(5), 1999, pp. 185-190

Authors: Kleine-Besten, T Loheide, S Brand, U Schlachetzki, A Butefisch, S Buttgenbach, S

Citation: T. Kleine-besten et al., 3D probe for dimensional metrology on microsystem components, TEC MES, 66(12), 1999, pp. 490-495