Authors: Urbansky, N Harris, M Butler, DC Rich, P Buchanan, K Goergens, C

Citation: N. Urbansky et al., Advanced long throw PVD for contact to silicon and via applications, MICROEL ENG, 55(1-4), 2001, pp. 397-402

Authors: Butler, DC Buchanan, K Burgess, SR Urbansky, N Schmidbauer, S

Citation: Dc. Butler et al., Liners for tungsten plug applications with long throw and ionized PVD, SOL ST TECH, 43(7), 2000, pp. 183

Authors: Butler, DC

Citation: Dc. Butler, Global sections and tensor products of line bundles over a curve, MATH Z, 231(3), 1999, pp. 397-407

Authors: Dirks, AG Webster, MN Turner, P Rich, P Butler, DC

Citation: Ag. Dirks et al., On the mechanism of aluminum via fill by reflow and forcefill as studied by transmission electron microscopy, J APPL PHYS, 85(1), 1999, pp. 571-577