Authors:
Butoi, CI
Steen, ML
Peers, JRD
Fisher, ER
Citation: Ci. Butoi et al., Mechanisms and energy transfer for surface generation of NH2 during NH3 plasma processing of metal and polymer substrates, J PHYS CH B, 105(25), 2001, pp. 5957-5967
Authors:
Butoi, CI
Mackie, NM
Gamble, LJ
Castner, DG
Barnd, J
Miller, AM
Fisher, ER
Citation: Ci. Butoi et al., Deposition of highly ordered CF2-rich films using continuous wave and pulsed hexafluoropropylene oxide plasmas, CHEM MATER, 12(7), 2000, pp. 2014-2024
Authors:
Butoi, CI
Mackie, NM
Williams, KL
Capps, NE
Fisher, ER
Citation: Ci. Butoi et al., Ion and substrate effects on surface reactions of CF2 using C2F6, C2F6/H-2, and hexafluoropropylene oxide plasmas, J VAC SCI A, 18(6), 2000, pp. 2685-2698
Authors:
Butoi, CI
Mackie, NM
Barnd, JL
Fisher, ER
Gamble, LJ
Castner, DG
Citation: Ci. Butoi et al., Control of surface film composition and orientation with downstream PECVD of hexafluoropropylene oxide, CHEM MATER, 11(4), 1999, pp. 862