Authors:
Klopp, JM
Pasini, D
Byers, JD
Willson, CG
Frechet, JMJ
Citation: Jm. Klopp et al., Microlithographic assessment of a novel family of transparent and etch-resistant chemically amplified 193-nm resists eased on cyclopolymers, CHEM MATER, 13(11), 2001, pp. 4147-4153
Authors:
Havard, JM
Shim, SY
Frechet, JMJ
Lin, QH
Medeiros, DR
Willson, CG
Byers, JD
Citation: Jm. Havard et al., Design of photoresists with reduced environmental impact. 1. Water-solubleresists based on photo-cross-linking of poly(vinyl alcohol), CHEM MATER, 11(3), 1999, pp. 719-725
Authors:
Havard, JM
Yoshida, M
Pasini, D
Vladimirov, N
Frechet, JMJ
Medeiros, DR
Patterson, K
Yamada, S
Willson, CG
Byers, JD
Citation: Jm. Havard et al., Design of photoresists with reduced environmental impact. II. Water-soluble resists based on photocrosslinking of poly(2-isopropenyl-2-oxazoline), J POL SC PC, 37(9), 1999, pp. 1225-1236
Authors:
Havard, JM
Vladimirov, N
Frechet, JMJ
Yamada, S
Willson, CG
Byers, JD
Citation: Jm. Havard et al., Photoresists with reduced environmental impact: Water-soluble resists based on photo-cross-linking of a sugar-containing polymethacrylate, MACROMOLEC, 32(1), 1999, pp. 86-94