Authors: STINE BE BONING DS CHUNG JE CAMILLETTI L KRUPPA F EQUI ER LOH W PRASAD S MUTHUKRISHNAN M TOWERY D BERMAN M KAPOOR A

Citation: Be. Stine et al., THE PHYSICAL AND ELECTRICAL EFFECTS OF METAL-FILL PATTERNING PRACTICES FOR OXIDE CHEMICAL-MECHANICAL POLISHING PROCESSES, I.E.E.E. transactions on electron devices, 45(3), 1998, pp. 665-679