Authors:
GEORGE I
CEMELI P
BONVALOT B
WAGENER M
GIRARD A
ZARUDIANSKY A
SUSKI J
Citation: I. George et al., THIN MEMBRANES WITH OPTIMIZED THERMOMECHANICAL PROPERTIES FOR MICROSYSTEM APPLICATIONS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 38-42