Authors:
CHAN ABY
NGUYEN CT
KO PK
CHAN STH
WONG SS
Citation: Aby. Chan et al., POLISHED TFTS - SURFACE-ROUGHNESS REDUCTION AND ITS CORRELATION TO DEVICE PERFORMANCE IMPROVEMENT, I.E.E.E. transactions on electron devices, 44(3), 1997, pp. 455-463
Authors:
CHAN ABY
NGUYEN CT
KO PK
WONG M
KUMAR A
SIN J
WONG SS
Citation: Aby. Chan et al., OPTIMIZING POLYSILICON THIN-FILM-TRANSISTOR PERFORMANCE WITH CHEMICAL-MECHANICAL POLISHING AND HYDROGENATION, IEEE electron device letters, 17(11), 1996, pp. 518-520