Authors:
VANHOVE JM
CHOW PP
ROSAMOND MF
CARPENTER GL
CHOW LA
Citation: Jm. Vanhove et al., CARBON DOPING BY A COMPACT ELECTRON-BEAM SOURCE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 1200-1202
Authors:
BOBEL FG
MOLLER H
WOWCHAK A
HERTL B
VANHOVE J
CHOW LA
CHOW PP
Citation: Fg. Bobel et al., PYROMETRIC INTERFEROMETRY FOR REAL-TIME MOLECULAR-BEAM EPITAXY PROCESS MONITORING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 1207-1210