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Authors: BALLANDRAS S DANIAU W BASROUR S ROBERT L ROUILLAY M BLIND P BERNEDE P ROBERT D ROCHER S HAUDEN D MEGTERT S LABEQUE A ZEWEN L DEXPERT H COMES R ROUSSEAUX F RAVERT MF LAUNOIS H
Citation: S. Ballandras et al., DEEP-ETCH X-RAY-LITHOGRAPHY USING SILICON-GOLD MASKS FABRICATED BY DEEP-ETCH UV LITHOGRAPHY AND ELECTROFORMING, Journal of micromechanics and microengineering, 5(3), 1995, pp. 203-208

Authors: MEGTERT S LABEQUE A LIU ZW DEXPERT H COMES R ROUSSEAUX F RAVET MF LAUNOIS H BALLANDRAS S DANIAU W BASROUR S ROUILLAY M BLIND P HAUDEN D
Citation: S. Megtert et al., DEEP-ETCH LITHOGRAPHY AT LURE-DCI STORAGE-RING, Journal de physique. IV, 4(C9), 1994, pp. 269-272
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