Authors:
SHUL RJ
LOVEJOY ML
BACA AG
ZOLPER JC
RIEGER DJ
HAFICH MJ
CORLESS RF
VARTULI CB
Citation: Rj. Shul et al., PLASMA-INDUCED DAMAGE OF GAAS DURING ETCHING OF REFRACTORY-METAL CONTACTS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 912-917
Authors:
WENDT JR
PLUT TA
CORLESS RF
MARTENS JS
BERKOWITZ S
CHAR K
JOHANSSON M
HOU SY
PHILLIPS JM
Citation: Jr. Wendt et al., NANOMETER-SCALE PATTERNING OF HIGH-T-C SUPERCONDUCTORS FOR JOSEPHSON JUNCTION-BASED DIGITAL CIRCUITS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3607-3610
Authors:
HOWARD AJ
ASHBY CIH
LOTT JA
SCHNEIDER RP
CORLESS RF
Citation: Aj. Howard et al., ELECTROCHEMICAL SULFUR PASSIVATION OF VISIBLE (SIMILAR-TO-670 NM) ALGAINP LASERS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1063-1067