NANOMETER-SCALE PATTERNING OF HIGH-T-C SUPERCONDUCTORS FOR JOSEPHSON JUNCTION-BASED DIGITAL CIRCUITS

Authors
WENDT JR PLUT TA CORLESS RF MARTENS JS BERKOWITZ S CHAR K JOHANSSON M HOU SY PHILLIPS JM
Citation
Jr. Wendt et al., NANOMETER-SCALE PATTERNING OF HIGH-T-C SUPERCONDUCTORS FOR JOSEPHSON JUNCTION-BASED DIGITAL CIRCUITS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3607-3610
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3607 - 3610
Database
ISI
SICI code
1071-1023(1994)12:6<3607:NPOHSF>2.0.ZU;2-N