Citation: T. Corman et al., DEEP WET ETCHING OF BOROSILICATE GLASS USING AN ANODICALLY BONDED SILICON SUBSTRATE AS MASK, Journal of micromechanics and microengineering, 8(2), 1998, pp. 84-87
Authors:
CORMAN T
KALVESTEN E
HUIKU M
WECKSTROM K
MERILAINEN P
STEMME G
Citation: T. Corman et al., NEW CO2 FILTERS FABRICATED BY ANODIC BONDING AT OVERPRESSURE IN CO2 ATMOSPHERE, Sensors and actuators. A, Physical, 69(2), 1998, pp. 166-171
Citation: T. Corman et al., LOW-PRESSURE-ENCAPSULATED RESONANT STRUCTURES WITH INTEGRATED ELECTRODES FOR ELECTROSTATIC EXCITATION AND CAPACITIVE DETECTION, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 160-166