AAAAAA

   
Results: 1-5 |
Results: 5

Authors: CORMAN T ENOKSSON P STEMME G
Citation: T. Corman et al., DEEP WET ETCHING OF BOROSILICATE GLASS USING AN ANODICALLY BONDED SILICON SUBSTRATE AS MASK, Journal of micromechanics and microengineering, 8(2), 1998, pp. 84-87

Authors: CORMAN T KALVESTEN E HUIKU M WECKSTROM K MERILAINEN P STEMME G
Citation: T. Corman et al., NEW CO2 FILTERS FABRICATED BY ANODIC BONDING AT OVERPRESSURE IN CO2 ATMOSPHERE, Sensors and actuators. A, Physical, 69(2), 1998, pp. 166-171

Authors: CORMAN T ENOKSSON P STEMME G
Citation: T. Corman et al., LOW-PRESSURE-ENCAPSULATED RESONANT STRUCTURES WITH INTEGRATED ELECTRODES FOR ELECTROSTATIC EXCITATION AND CAPACITIVE DETECTION, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 160-166

Authors: CORMAN T ENOKSSON P STEMME G
Citation: T. Corman et al., GAS DAMPING OF ELECTROSTATICALLY EXCITED RESONATORS, Sensors and actuators. A, Physical, 61(1-3), 1997, pp. 249-255

Authors: CORMAN T
Citation: T. Corman, FORMAL VERIFICATION - A REPLACEMENT FOR SIMULATION, Electronic design, 43(26), 1995, pp. 48-48
Risultati: 1-5 |