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Maher, JF
Shaete, M
Smirnoff, A
Cameron, DG
Winkelmann, JC
Goldberg, SJ
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Authors:
Murphy, MJ
Monaghan, J
Tyrrell, M
Walsh, R
Cameron, DG
Chowdhury, AKMS
Monclus, M
Hashmi, MSJ
Citation: Mj. Murphy et al., Penning type magnetron sputtering source and its use in the production of carbon nitride coatings, J VAC SCI A, 17(1), 1999, pp. 62-69