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Citation: Hi. Smith et al., Soft x-rays for deep sub-100 nm lithography, with and without masks, MICROEL ENG, 53(1-4), 2000, pp. 77-84

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Authors: Carter, DJD Gil, D Menon, R Mondol, MK Smith, HI Anderson, EH

Citation: Djd. Carter et al., Maskless, parallel patterning with zone-plate array lithography, J VAC SCI B, 17(6), 1999, pp. 3449-3452