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Results: 1
Kinetics of LPCVD of aluminium nitride films based on pyrolysis of aluminium chloride complex
Authors:
Alexandrov, SE Chistiakov, VA
Citation:
Se. Alexandrov et Va. Chistiakov, Kinetics of LPCVD of aluminium nitride films based on pyrolysis of aluminium chloride complex, J PHYS IV, 11(PR3), 2001, pp. 155-161
Risultati:
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