Authors:
Lee, JH
Lee, MB
Hahm, SH
Choi, HC
Lee, JH
Lee, JH
Kim, JS
Choi, KM
Choi, CA
Citation: Jh. Lee et al., Field activated lateral-type polysilicon emitter with extremely high emission current and very low turn-on voltage, J VAC SCI B, 19(3), 2001, pp. 1055-1058
Authors:
Jang, WI
Choi, CA
Lee, JH
Jun, CH
Yang, H
Kim, YT
Citation: Wi. Jang et al., Characterization of residues on anhydrous HF gas-phase etching of sacrificial oxides for surface micromachining, JPN J A P 1, 39(1), 2000, pp. 337-342
Authors:
Zang, WJ
Lee, JH
Lee, JH
Bae, YH
Choi, CA
Hahm, SH
Citation: Wj. Zang et al., Lateral field emission diode with wedge-type tip and nanogap on separationby implantation of oxygen silicon, J VAC SCI B, 18(2), 2000, pp. 1006-1008
Authors:
Choi, CA
Lee, CS
Jang, WI
Hong, YS
Lee, JH
Sohn, BK
Citation: Ca. Choi et al., Stress characteristics of multilayered polysilicon film for the fabrication of microresonators, JPN J A P 1, 38(6A), 1999, pp. 3693-3699
Citation: Cs. Lee et al., Effects of phosphorus on stress of multi-stacked polysilicon film and single crystalline silicon, J MICROM M, 9(3), 1999, pp. 252-263