Citation: Yf. Chong et al., Study of the morphological modifications induced by laser annealing of preamorphized silicon, SURF REV L, 8(5), 2001, pp. 441-445
Authors:
Chong, YF
Pey, KL
Lu, YF
Wee, ATS
Osipowicz, T
Seng, HL
See, A
Dai, JY
Citation: Yf. Chong et al., Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p(+)/n junctions, APPL PHYS L, 77(19), 2000, pp. 2994-2996
Authors:
Chong, YF
Pey, KL
Wee, ATS
See, A
Chan, L
Lu, YF
Song, WD
Chua, LH
Citation: Yf. Chong et al., Annealing of ultrashallow p(+)/n junction by 248 nm excimer laser and rapid thermal processing with different preamorphization depths, APPL PHYS L, 76(22), 2000, pp. 3197-3199