Authors: Chua, CT Sarkar, G Chooi, SYM Chan, L

Citation: Ct. Chua et al., Spin-on-polymer methylsilsesquioxane for sub-micron intermetal dielectric application, J MAT SCI L, 18(17), 1999, pp. 1437-1439

Authors: Chua, CT Sarkar, G Chooi, SYM Chan, L

Citation: Ct. Chua et al., Lower temperature and shorter curing time of methylsilsesquioxane for intermetal dielectric application, J MAT SCI L, 18(1), 1999, pp. 33-34